ISSN: 1003-6326
CN: 43-1239/TG

Vol. 17    Special 1    November 2007

XPS study of BZT thin film deposited on Pt/Ti/SiO2/Si substrate by
pulsed laser deposition
JIANG Yan-ping(蒋艳平)1, 2, TANG Xin-gui(唐新桂)1, LIU Qiu-xiang(刘秋香)1,
CHENG Tie-dong(程铁栋)1, ZHOU Yi-chun(周益春)2
(1. School of Physics & Optoelectric Engineering, Guangdong University of Technology,
Guangzhou Higher Education Mega Center, Guangzhou 510006, China;
2. Key Laboratory of Low Dimensional Materials and Application Technology, Xiangtan University,
Xiangtan 411105, China
Abstract: Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surface morphology of the thin film were studied by X-ray diffractometry (XRD) and scan electronic microscopy (SEM). The composition and chemical state near the film surface were obtained by X-ray photoelectron spectroscopy (XPS). On the sample surface, O 1s spectra can be assigned to those from the lattice and surface adsorbed oxygen ions, while C1s only result from surface contamination. The result shows that only one chemical state is found for each spectrum of Ba 3d, Zr 3d and Ti 2p photoelectron in the BZT thin film.
Key words: chemical state; XPS; BZT thin film; pulsed laser deposition
Superintended by The China Association for Science and Technology (CAST)
Sponsored by The Nonferrous Metals Society of China (NFSOC)
Managed by Central South University (CSU)